Is Tmah corrosive?
TMAH is extremely corrosive to skin, eyes, and mucous membranes and will cause serious burns to eyes, and skin on contact. In addition to causing chemical burns, TMAH can cause systemic neurotoxicity leading to respiratory failure by ganglion block that occurs through skin absorption.
Is Tmah a strong base?
TMAH is a strong base; the 25% solution in water has a pH of greater than 13. The odor of TMAH has been described as a strong, ammonia-like smell.
Does TMAH etch silicon oxide?
A study of tetramethylammonium hydroxide (TMAH) etching of silicon and the interaction of etching parameters has been carried out. We find that the silicon etch rate increases as the TMAH concentration increases and it reaches a maximum at 4 wt.
What is anisotropic wet etching?
Definition. Anisotropic etching is a subtractive microfabrication technique that aims to preferentially remove a material in specific directions to obtain intricate and often flat shapes. Wet techniques exploit the crystalline properties of a structure to etch in directions governed by crystallographic orientation.