What is scatterometry metrology?
Scatterometry is a metrology technique that combines the sensitivity of diffraction from periodic structures with a first principle solution of electromagnetic wave diffraction from these structures.
What is metrology semiconductor?
Semiconductor metrology instruments are designed for wafer and thin film in-line inspection after semiconductor processing. By using semiconductor metrology instruments, manufacturers can facilitate semiconductor inspection, reduce manufacturing costs, and shorten the product development cycle.
What is OCD semiconductor?
Optical Critical Dimension (OCD) spectroscopy is a key technology used for optical metrology and process control in semiconductor manufacturing. OCD enables measurements of the smallest semiconductor design features down to the nanometer level.
What is optical scatterometry?
Optical Scatterometry is a method of characterizing unknown properties of a sample by measuring the reflection of broadband light from an object. The reflection varies by wavelength (color), polarization, and angle-of-incidence.
What is a scatterometer used for?
Scatterometers are active remote sensing instruments for deriving wind direction and speed from the roughness of the sea. They are used by low Earth orbiting satellites and act like radars: they transmit electromagnetic pulses and detect the backscattered signals.
What is optical critical dimension?
Optical Critical Dimension (OCD) measurements using Normal-Incidence Spectroscopic Ellipsometry (polarized reflectance) allow for the separation of transverse electric and transverse magnetic modes of light reflected from an anisotropic sample as found in a periodic grating structure.
What is semiconductor lithography?
A semiconductor lithography system undertakes a process whereby highly complex circuit patterns drawn on a photomask made of a large glass plate are reduced using ultra-high-performance lenses and exposed onto a silicon substrate known as a wafer. …
How does a satellite scatterometer work?
A radar scatterometer operates by transmitting a pulse of microwave energy towards the Earth’s surface and measuring the reflected energy. A separate measurement of the noise-only power is made and subtracted from the signal+noise measurement to determine the backscatter signal power.
How does a scatterometer work?
What is an active remote sensor?
Remote sensing instruments are of two primary types: Active sensors, provide their own source of energy to illuminate the objects they observe. An active sensor emits radiation in the direction of the target to be investigated. Reflected sunlight is the most common source of radiation measured by passive sensors.
What is semiconductor give example?
A semiconductor material has an electrical conductivity value falling between that of a conductor, such as metallic copper, and an insulator, such as glass. Some examples of semiconductors are silicon, germanium, gallium arsenide, and elements near the so-called “metalloid staircase” on the periodic table.
How is scatterometry used in the semiconductor industry?
This program aims to develop standards, methods, and modeling for assessing the periodic structures using optical reflectance and transmittance measurements. In the past few years, scatterometry has emerged as a method for performing linewidth and line profile metrology, especially by the semiconductor industry.
What is the purpose of scatterometry in metrology?
Scatterometry is a fast, precise and low cost way to determine the mean pitch and dimensional parameters of periodic structures with lateral resolution of a few nanometer. It is robust enough for in-line process control and precise and accurate enough for metrology measurements.
How are scatterometers used in the real world?
Scatterometers are widely used in metrology for roughness of polished and lapped surfaces in semiconductor and precision machining industries. They provide a fast and non-contact alternative to traditional stylus methods for topography assessment.
When do you need to extend scatterometry to three dimensional?
Extensions to the scatterometry technique need to be explored. For example, the method is primarily used to assess two-dimensional profiles. Extending scatterometry to three-dimensional profiles may reduce the need for non-functioning targets, or allow measurement of line-edge and line-width roughness.