What is tetramethylammonium hydroxide used for?
General Description and Uses TMAH solution is widely used in the electronics industry as a developer or cleaner. TMAH is typically one of several ingredients in etching / stripping mixtures, although it may also be used as a pure chemical. It is often used in solution in water, and less frequently, in methanol.
What is the formula for tetramethylammonium hydroxide?
C4H13NO
Tetramethylammonium hydroxide/Formula
How do you dispose of tetramethylammonium hydroxide?
Soak up with inert absorbent material and dispose of as hazardous waste. Keep in suitable, closed containers for disposal.
What is TMAH etching?
KOH and TMAH are anisotropic silicon etches, used to make V-grooves, membranes, and holes through wafers, as well as other devices. TMAH is a organic hydroxide and stands for Tetramethyl ammonium hydroxide. KOH for etching comes in bottles of 45% by weight concentration and TMAH comes as 25% by weight concentration.
Is TMAH flammable?
FIRE HAZARDS * Tetramethyl Ammonium Hydroxide is a FLAMMABLE LIQUID.
What is the meaning TMAH?
Tetramethylammonium hydroxide (TMAH or TMAOH) is a quaternary ammonium salt with the molecular formula N(CH3)4+ OH−. It is commonly encountered as concentrated solutions in water or methanol. The solid and solutions are colorless, or yellowish if impure.
Is Tmah toxic?
Highly toxic liquid. It is a very strong base with a pH >13. Concentrations between 10 and 25% TMAH will cause 2nd and 3rd degree burns if exposed to skin. Corrodes certain metals. Exposure may result in intense burning of the eyes, nose, throat, lungs and skin.
What is Tmah etching?
Does TMAH etch have silicon?
Keep in mind that KOH and TMAH will etch any exposed silicon. A masking layer may need to be applied to the backside of the wafer or a carrier used that will protect the backside.